Reliability of MEMS testing of materials and devices /
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Autor Corporativo: | ebrary, Inc |
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Outros Autores: | Tabata, Osamu, Tsuchiya, Toshiyuki |
Formato: | Recurso Electrónico livro electrónico |
Idioma: | inglês |
Publicado em: |
Weinheim :
Wiley-VCH,
2013.
|
Colecção: | Advanced micro & nanosystems.
|
Assuntos: | |
Acesso em linha: | An electronic book accessible through the World Wide Web; click to view |
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