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Reliability of MEMS testing of materials and devices /

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Detalles Bibliográficos
Autor Corporativo:	ebrary, Inc
Outros autores:	Tabata, Osamu, Tsuchiya, Toshiyuki
Formato:	Electrónico eBook
Idioma:	inglés
Publicado:	Weinheim : Wiley-VCH, 2013.
Series:	Advanced micro & nanosystems.
Subjects:	Microelectromechanical systems > Reliability. Electronic books.
Acceso en liña:	An electronic book accessible through the World Wide Web; click to view
Tags:	Engadir etiqueta Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!

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