Reliability of MEMS testing of materials and devices /
Guardat en:
| Autor corporatiu: | |
|---|---|
| Altres autors: | , |
| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
Weinheim :
Wiley-VCH,
2013.
|
| Col·lecció: | Advanced micro & nanosystems.
|
| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
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