Technology evolution for silicon nano-electronics selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan /
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Corporate Authors: | , |
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Other Authors: | , |
Format: | Electronic Conference Proceeding eBook |
Language: | English |
Published: |
Stafa-Zurich, Switzerland ; Enfield, N.H. :
Trans Tech Publications,
c2011.
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Series: | Key engineering materials,
v. 470 |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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Physical Description: | xi, 234 p. : ill. |
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Bibliography: | Includes bibliographical references and indexes. |
ISSN: | 1013-9826 ; |