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Resonant MEMS : fundamentals, implementation and application /

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Bibliografske podrobnosti
Drugi avtorji:	Brand, Oliver (Editor)
Format:	Elektronski eKnjiga
Jezik:	angleščina
Izdano:	Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Serija:	Advanced micro & nanosystems.
Teme:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Online dostop:	An electronic book accessible through the World Wide Web; click to view
Oznake:	Označite Brez oznak, prvi označite!

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