Glancing angle deposition of thin films : engineering the nanoscale /

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Detalles Bibliográficos
Main Authors:	Hawkeye, Matthew M. (Author), Taschuk, Michael T. (Author), Brett, Michael J. (Author)
Formato:	Electrónico eBook
Idioma:	inglés
Publicado:	Chichester, England : Wiley, 2014.
Series:	Wiley series in materials for electronic and optoelectronic applications.
Subjects:	Nanotechnology. Chemical vapor deposition. Nanoelectromechanical systems > Design and construction. Electronic books.
Acceso en liña:	An electronic book accessible through the World Wide Web; click to view
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