Atomic layer deposition principles, characteristics, and nanotechnology applications /
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Main Author: | Kaariainen, Tommi |
---|---|
Corporate Author: | ebrary, Inc |
Format: | Electronic eBook |
Language: | English |
Published: |
Hoboken, NJ :
John Wiley & Sons,
c2013.
|
Edition: | 2nd ed. |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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