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Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Baltes, Henry
Format:	Electronic eBook
Language:	English
Published:	Weinheim [Germany] : Wiley, 2013.
Subjects:	Microelectronics. Nanotechnology. Microelectromechanical systems. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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