Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
Gorde:
Egile nagusia: | Ree, Moonhor |
---|---|
Erakunde egilea: | ebrary, Inc |
Beste egile batzuk: | Yoon, Jinhwan, Heo, Kyuyoung |
Formatua: | Baliabide elektronikoa eBook |
Hizkuntza: | ingelesa |
Argitaratua: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
Saila: | Nanotechnology science and technology series.
|
Gaiak: | |
Sarrera elektronikoa: | An electronic book accessible through the World Wide Web; click to view |
Etiketak: |
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