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Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...

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Detalles Bibliográficos
Autor Corporativo:	ebrary, Inc
Otros Autores:	Landis, Stefan
Formato:	Electrónico eBook
Lenguaje:	inglés
Publicado:	London : Hoboken, N.J. : ISTE ; Wiley, 2011.
Materias:	Microlithography. Electronic books.
Acceso en línea:	An electronic book accessible through the World Wide Web; click to view
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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