Silicon technologies ion implantation and thermal treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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企业作者: | ebrary, Inc |
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其他作者: | Baudrant, Annie |
格式: | 电子 电子书 |
语言: | 英语 |
出版: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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在线阅读: | An electronic book accessible through the World Wide Web; click to view |
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