Handbook of silicon based MEMS materials and technologies

I tiakina i:
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Kaituhi rangatōpū: ebrary, Inc
Ētahi atu kaituhi: Lindroos, Veikko
Hōputu: Tāhiko īPukapuka
Reo:Ingarihi
I whakaputaina: Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Putanga:1st ed.
Rangatū:Micro & nano technologies.
Ngā marau:
Urunga tuihono:An electronic book accessible through the World Wide Web; click to view
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