APA (7th ed.) Citation

ebrary, Inc, & Lindroos, V. (2010). Handbook of silicon based MEMS materials and technologies. William Andrew/Elsevier.

Chicago Style (17th ed.) Citation

ebrary, Inc, and Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. Amsterdam ; Boston: William Andrew/Elsevier, 2010.

MLA (9th ed.) Citation

ebrary, Inc, and Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew/Elsevier, 2010.