An introduction to microelectromechanical systems engineering
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| Главный автор: | |
|---|---|
| Соавтор: | |
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| Формат: | Электронный ресурс eКнига |
| Язык: | английский |
| Опубликовано: |
Boston :
Artech House,
2004.
|
| Редактирование: | 2nd ed. |
| Серии: | Microelectromechanical systems series.
|
| Предметы: | |
| Online-ссылка: | An electronic book accessible through the World Wide Web; click to view |
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