An introduction to microelectromechanical systems engineering

Understanding MEMS : principles and applications /
著者:: Castañer, Luis
出版事項: (2016)

Handbook of silicon based MEMS materials and technologies
出版事項: (2010)

Hermeticity testing of MEMS and microelectronic packages /
著者:: Costello, Suzanne, 等
出版事項: (2013)

Smart mems and sensor systems
著者:: Gaura, Elena
出版事項: (2006)

Micro, nanosystems, and systems on chips modeling, control, and estimation /
出版事項: (2010)

Silicon carbide micro electromechanical systems for harsh environments
出版事項: (2006)

Introduction to microfabrication
著者:: Franssila, Sami
出版事項: (2010)

MEMS mechanical sensors
出版事項: (2004)

Reliability of MEMS testing of materials and devices /
出版事項: (2013)

MEMS for automotive and aerospace applications /
出版事項: (2013)

NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /
出版事項: (2011)

Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
出版事項: (2014)

Introduction to microelectromechanical microwave systems
著者:: Santos, Héctor J. de los
出版事項: (2004)

Cost-driven design of smart microsystems
著者:: Niedermayer, Michael, 1971-
出版事項: (2012)

On-chip pretreatment of whole blood by using MEMS technology
出版事項: (2012)

Resonant MEMS : fundamentals, implementation and application /
出版事項: (2015)

Materials and failures in MEMS and NEMS /
出版事項: (2015)

Integrated microwave front-ends with avionics applications
著者:: Maloratsky, Leo G.
出版事項: (2012)

Lab-on-a-chip techniques, circuits, and biomedical applications /
著者:: Ghallab, Yehya H.
出版事項: (2010)

Microelectromechanical systems advanced materials and fabrication methods /
出版事項: (1997)

Digital holography for MEMS and microsystem metrology
出版事項: (2011)

Engineering robots, desktops and micromachines.
出版事項: (2003)

Engineering: robots, desktops and micromachines
出版事項: (2003)

Introduction to microfluidics
著者:: Tabeling, P.
出版事項: (2005)

Understanding microelectronics a top-down approach /
著者:: Maloberti, F. (Franco)
出版事項: (2012)

Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan /
出版事項: (2013)

Micro- and nanomanipulation tools /
出版事項: (2015)

Trends in nano- and micro-cavities
出版事項: (2011)

Micro- and nanosystems for biotechnology /
出版事項: (2016)

Disclosing materials at the nanoscale : proceedings of the International Symposium "Disclosing Materials at the Nanoscale" of CIMTEC 2006 - 11th International Ceramics Congress and 4th Forum on New Materials, held in Acireale, Sicily, Italy on June 4-9, 2006 /
出版事項: (2006)

Micro-manufacturing engineering and technology
出版事項: (2010)

Microdevices in biology and medicine
出版事項: (2009)

Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /
出版事項: (2013)

Fundamentals and applications of microfluidics
著者:: Nguyen, Nam-Trung, 1970-
出版事項: (2006)

Mechatronics for safety, security and dependability in a new era
出版事項: (2007)

Ceramics processing in microtechnology
出版事項: (2009)