An introduction to microelectromechanical systems engineering
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| Autor principal: | |
|---|---|
| Autor corporatiu: | |
| Altres autors: | |
| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
Boston :
Artech House,
2004.
|
| Edició: | 2nd ed. |
| Col·lecció: | Microelectromechanical systems series.
|
| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
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