Database needs for modeling and simulation of plasma processing
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | Englisch |
| Veröffentlicht: |
Washington, D.C. :
National Academy Press,
1996.
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| Schriftenreihe: | Compass series (Washington, D.C.)
|
| Schlagworte: | |
| Online-Zugang: | An electronic book accessible through the World Wide Web; click to view |
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MARC
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| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7871.85 |b .D374 1996eb |
| 245 | 0 | 0 | |a Database needs for modeling and simulation of plasma processing |h [electronic resource] / |c Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1996. | ||
| 300 | |a 64 p. | ||
| 490 | 1 | |a The compass series | |
| 504 | |a Includes bibliographical references. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Semiconductors |x Design and construction |v Congresses. | |
| 650 | 0 | |a Plasma engineering |x Databases |v Congresses. | |
| 650 | 0 | |a Plasma engineering |x Computer simulation |v Congresses. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Compass series (Washington, D.C.) | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10056959 |z An electronic book accessible through the World Wide Web; click to view |
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| 999 | |c 61729 |d 61729 | ||