Microelectromechanical systems advanced materials and fabrication methods /
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Corporate Authors: | National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, ebrary, Inc |
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Format: | Electronic eBook |
Language: | English |
Published: |
Washington, DC :
National Academy Press,
1997.
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Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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