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  1. 1
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    Microelectromechanical systems advanced materials and fabrication methods /

    Published 1997
    An electronic book accessible through the World Wide Web; click to view
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  2. 2
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    Introduction to microelectromechanical microwave systems by Santos, Héctor J. de los

    Published 2004
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  3. 3
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    An introduction to microelectromechanical systems engineering by Maluf, Nadim

    Published 2004
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  4. 4
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    RF MEMS circuit design for wireless communications by Santos, Héctor J. de los

    Published 2002
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  5. 5
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    MEMS mechanical sensors

    Published 2004
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  6. 6
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    Analysis and design principles of MEMS devices by Bao, Min-Hang

    Published 2005
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  7. 7
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    Mechatronics for safety, security and dependability in a new era

    Published 2007
    An electronic book accessible through the World Wide Web; click to view
    Electronic Conference Proceeding eBook

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  8. 8
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    Introduction to microfluidics by Tabeling, P.

    Published 2005
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  9. 9
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    Silicon carbide micro electromechanical systems for harsh environments

    Published 2006
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  10. 10
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    Smart mems and sensor systems by Gaura, Elena

    Published 2006
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  11. 11
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    Microdevices in biology and medicine

    Published 2009
    An electronic book accessible through the World Wide Web; click to view
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  12. 12
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    Fundamentals and applications of microfluidics by Nguyen, Nam-Trung, 1970-

    Published 2006
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  13. 13
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    Handbook of silicon based MEMS materials and technologies

    Published 2010
    An electronic book accessible through the World Wide Web; click to view
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  14. 14
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    Lab-on-a-chip techniques, circuits, and biomedical applications / by Ghallab, Yehya H.

    Published 2010
    An electronic book accessible through the World Wide Web; click to view
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  15. 15
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    Introduction to microfabrication by Franssila, Sami

    Published 2010
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  16. 16
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    MEMS-based integrated navigation by Aggarwal, Priyanka

    Published 2010
    An electronic book accessible through the World Wide Web; click to view
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  17. 17
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    Digital holography for MEMS and microsystem metrology

    Published 2011
    An electronic book accessible through the World Wide Web; click to view
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  18. 18
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    Trends in nano- and micro-cavities

    Published 2011
    An electronic book accessible through the World Wide Web; click to view
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  19. 19
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    Handbook of wafer bonding

    Published 2012
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  20. 20
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    Cost-driven design of smart microsystems by Niedermayer, Michael, 1971-

    Published 2012
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