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  1. 1
    Introduction to microelectromechanical microwave systems

    Introduction to microelectromechanical microwave systems by Santos, Héctor J. de los

    Published 2004
    “…Microelectromechanical systems series.…”
    An electronic book accessible through the World Wide Web; click to view
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  2. 2
    An introduction to microelectromechanical systems engineering

    An introduction to microelectromechanical systems engineering by Maluf, Nadim

    Published 2004
    “…Microelectromechanical systems series.…”
    An electronic book accessible through the World Wide Web; click to view
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  3. 3
    MEMS mechanical sensors

    MEMS mechanical sensors

    Published 2004
    “…Microelectromechanical systems series.…”
    An electronic book accessible through the World Wide Web; click to view
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