Search Results - "lithography"

Lithography principles, processes and materials /

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Lithography main techniques /

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Computational lithography by Ma, Xu, 1983-

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Fundamental principles of optical lithography the science of microfabrication / by Mack, Chris A.

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Nanoimprint technology nanotransfer for thermoplastic and photocurable polymer /

Subjects: “…Nanoimprint lithography.…”
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1-Dimensional Metal Oxide Nanostructures : Growth, Properties, and Devices /

Table of Contents: “…Formation of SiO2 Nanowires by Local Anodic Oxidation Process via AFM Lithography for the Fabrication of Silicon Nanowires -- Khatijah Aisha Yaacob, Siti Noorhaniah Yusoh, Nurain Najihah Alias, and Ahmad Makarimi Abdullah].…”
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Basic principles of nanotechnology / by Sanders, Wesley Crowell

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Integrated circuit fabrication / by Shubham, Kumar, Gupta, Ankaj

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Imidic polymers and green polymer chemistry : new technology and developments in process and products /

Table of Contents: “…Aromatic-Alicyclic Polyimides: From Basic Aspects Toward High Technologies / Camelia Hulubei, Elena Hamciuc, and Corneliu Hamciuc -- Polyimides with Bulky Groups: Synthesis, Characterization, and Physical Properties / Barnali Dasgupta Ghosh, Susanta Banerjee, Alexander Alentiev, Inga Ronova, and Yuri Yampolskii -- The Thermal Cis-Trans Isomerization of Azopolyimides in the Solid State / Jolanta Konieczkowska -- From Insulating to Conducting Polyimides / Göknur Dönmez, Ayça Ergün, Merve Okutan, and Hüseyi̇n Deli̇göz -- Molecular Modeling of Imidic Polymers with Advanced Physico-Chemical Properties / Raluca Marinica Albu -- Patterning Polyimide Films at Nanoscale Using Dynamic Plowing Lithography / Iuliana Stoica -- Polyimide Materials for Transistors and Biosensors Manufacturing / Raluca Marinica Albu and Razvan Florin Barzic -- Natural Fibers: Modifications and Enhancements in Applications / Ananthu Prasad, Sabu Thomas, and Athira John -- Polyethylene Wax: Uses, Characterization, and Identification / Senem Yetgin, Mehmet Gonen, Sevdiye Atakul Savrık, and Devrim Balkose -- Supercapacitor: An Efficient Approach for Energy Storage Device / Shama Islam, Hana Khan, and M. …”
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Nanocarbon Electronics by Zhou, Changjian

Table of Contents: “…Nanocarbons for Flexible Sensing Applications -- 6.1 Introduction and Overview for Flexible Nanocarbon Electronics -- 6.2 Flexible Device Fabrication -- 6.2.1 Flexible Substrate Selection -- 6.2.2 Fabrication Techniques -- 6.2.2.1 Lithography -- 6.2.2.2 Nanocarbon ink preparation -- 6.2.2.3 Nanocarbon printing…”
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CORONA DISCHARGE MICROMACHINING FOR THE SYNTHESIS OF NANOPARTICLES characterization and... applications. by Sahu, Ranjeet Kumar

Table of Contents: “…Cover; Half Title; Title Page; Copyright Page; Contents; Preface; Notations; 1: Introduction; 1.1 Fundamentals of Nanoparticles; 1.2 Classification of Nanoparticles; 1.3 Overview of Application of Nanoparticles; 1.4 Research on Nanoparticles; 1.4.1 Review on Nanoparticles Synthesis; 1.4.2 Review on Nanoparticles Stabilization and Application; 1.5 Motivation; 1.6 Methodology; References; 2: Synthesis Methods; 2.1 Introduction; 2.2 Synthesis Methods; 2.2.1 Mechanical Methods; 2.2.1.1 Ball Milling Method; 2.2.1.2 Lithography Method; 2.2.2 Liquid Phase Reaction Methods…”
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Guide to state-of-the-art electron devices

Table of Contents: “…Machine generated contents note: Foreword Preface Contributors and Acknowledgements Historic Timeline Part I - Basic Electron Devices 1 Bipolar Transistors 1.1 Motivation 1.2 The pn Junction and Its Electronic Applications 1.3 The Bipolar Junction Transistor and Its Electronic Applications 1.4 Optimization of Bipolar Transistors 1.5 SiGe Heterojunction Bipolar Transistors References 2 MOS Devices 2.1 Introduction 2.2 MOSFET Basics 2.3 The Evolution of MOSFET 2.4 Concluding Remarks References 3 Memory Devices 3.1 Introduction 3.2 Volatile Memories 3.3 Non-Volatile Memories 3.4 Future Perspectives of MOS Memories 3.5 Closing Remarks References 4 Passive Components 4.1 Discrete and integrated passive components 4.2 Application in Analog ICs and DRAM 4.3 The planar Spiral Inductor - A Case Study 4.4 Parasitics in Integrated Circuits References 5 Emerging Research Devices 5.1 Non-Charge Based Switching 5.2 Carbon as a Replacement for Silicon and the Rise of Moletronics 5.3 Conclusions References Part II - Aspects of Device and IC Manufacturing 6 Electronics Materials 6.1 Introduction 6.2 Silicon Device Technology 6.3 Compound Semiconductor Devices 6.4 Electronic Displays 6.5 Conclusions References 7 Compact Modeling 7.1 The Role of Compact Models 7.2 Bipolar Transistor Compact Modeling 7.3 MOS Transistor Compact Modeling 7.4 Compact Modeling of Passive Components 7.5 Benchmarking and Implementation References 8 Technology Computer Aided Design 8.1 Introduction 8.2 Drift-Diffusion Model 8.3 Microscopic Transport Models 8.4 Quantum Transport Models 8.5 Process and Equipment Simulation References 9 Device Reliability Physics 9.1 Introduction and Background 9.2 Device Reliability Issues 9.3 Interconnect Degradation Mechanisms 9.4 Circuit-Level Reliability Issues 9.5 Microscopic Approaches to Assuring Reliability of ICs References 10 Semiconductor Manufacturing 10.1 Introduction 10.2 Substrates 10.3 Lithography and Etching 10.4 Front-End Processing 10.5 Back-End Processing 10.6 Process Control 10.7 Assembly and Test 10.8 Future Directions References Part III - Applications based on Electron Devices 11 VLSI Logic Technology and Circuits 11.1 Introduction 11.2 MOSFET Scaling Trends 11.3 Low-Power and High-Speed Logic Design 11.4 Scaling-Driven technology Enhancements 11.5 Ultra-Low Voltage Transistors 11.6 Interconnects 11.7 Memory Design 11.8 System Integration References 12 VLSI Mixed-Signal Technology And Circuits 12.1 Introduction 12.2 Analog/Mixed-Signal Technologies in Scaled CMOS 12.3 Data Converter ICs 12.4 Mixed-Signal Circuits in Low-Power Display Applications 12.5 Image Sensor Technology and Circuits References 13 Memory Technologies 13.1 Semiconductor Memory History 13.2 State of Mainstream Semiconductor Memory Today 13.3 Emerging Memory Technologies 13.4 Conclusions References 14 RF&Microwave Semiconductor Technologies 14.1 III-V Based: GaAs and InP 14.2 Si and SiGe 14.3 Wide Bandgap Devices (Group III-Nitrides, SiC and Diamond) References 15 Power Devices and ICs 15.1 Overview of Power Devices & ICs 15.2 Two-Carrier and High-Power Devices 15.3 Power MOSFET Devices 15.4 High-Voltage and Power ICs 15.5 Wide Bandgap Power Devices References 16 Photovoltaic Device Applications 16.1 Introduction 16.2 Silicon Photovoltaics 16.3 Polycrystalline Thin-Film Photovoltaics 16.4 III-V Compound Photovoltaics 16.5 Future Concepts in Photovoltaics References 17 Large Area Electronics 17.1 Thin-Film Solar Cells 17.2 Large-Area Imaging 17.3 Flat-Panel Displays References 18 Microelectromechanical Systems (MEMS) 18.1 Introduction 18.2 The 1960's - First Micromachined Structures Envisioned 18.3 The 1970's - Integrated Sensors Started 18.4 The 1980's - Surface Micromachining Emerged 18.5 The 1990's - MEMS Impacted Various Fields 18.6 The 2000's - Diversified Sophisticated Systems Enabled By MEMS 18.7 Future Outlook References 19 Vacuum Device Applications 19.1 Traveling-Wave Devices 19.2 Klystrons 19.3 Inductive Output Tubes 19.4 Crossed-Field Devices 19.5 Gyro-Devices References 20 Optoelectronic Device Applications 20.1 Introduction 20.2 Light Emission in Semiconductors 20.3 Photodetectors 20.4 Integrated Optoelectronics 20.5 Optical Interconnects 20.6 Concluding Remarks References 21 Devices for the Post Silicon CMOS Era 21.1 Introduction 21.2 Devices for the 8-nm Node With Conventional Materials 21.3 New Channel Materials and Devices 21.4 Concluding Remarks References Index.…”
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Design and fabrication of self-powered micro-harvesters : rotating and vibrated micro-power systems / by Pan, C. T., Hwang, Y. M., Lin, Liwei, Chen, Yingzhong

Table of Contents: “…Machine generated contents note: About the Authors xi Preface xiii Acknowledgments xv 1 Introduction 1 1.1 Background 1 1.2 Energy Harvesters 2 1.2.1 Piezoelectric ZnO Energy Harvester 3 1.2.2 Vibrational Electromagnetic Generators 3 1.2.3 Rotary Electromagnetic Generators 4 1.2.4 NFES Piezoelectric PVDF Energy Harvester 4 1.3 Overview 5 2 Design and Fabrication of Flexible Piezoelectric Generators Based on ZnO Thin Films 7 2.1 Introduction 7 2.2 Characterization and Theoretical Analysis of Flexible ZnO-Based Piezoelectric Harvesters 10 2.2.1 Vibration Energy Conversion Model of Film-Based Flexible Piezoelectric Energy Harvester 10 2.2.2 Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12 2.2.3 Optimal Thickness of PET Substrate 15 2.2.4 Model Solution of Cantilever Plate Equation 15 2.2.5 Vibration-Induced Electric Potential and Electric Power 18 2.2.6 Static Analysis to Calculate the Optimal Thickness of the PET Substrate 19 2.2.7 Model Analysis and Harmonic Analysis 21 2.2.8 Results of Model Analysis and Harmonic Analysis 23 2.3 The Fabrication of Flexible Piezoelectric ZnO Harvesters on PET Substrates 27 2.3.1 Bonding Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27 2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29 2.3.3 Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29 2.3.4 Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering 31 2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant Conditions 34 2.3.6 Application of ZnO/PET-Based Generator to Flash Signal LED Module 39 2.3.7 Design and Performance of a Broad Bandwidth Energy Harvesting System 40 2.4 Fabrication and Performance of Flexible ZnO/SUS304-Based Piezoelectric Generators 48 2.4.1 Deposition of Piezoelectric ZnO Thin Films on Stainless Steel Substrates 48 2.4.2 Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 50 2.4.3 Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 51 2.4.4 Characterization of ZnO/SUS304-Based Flexible Piezoelectric Generators 52 2.4.5 Structural and Morphological Properties of Piezoelectric ZnO Thin Films on Stainless Steel Substrates 54 2.4.6 Analysis of Adhesion of ZnO Thin Films on Stainless Steel Substrates 56 2.4.7 Electrical Properties of Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 59 2.4.8 Characterization of Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator: Analysis and Modification of Back Surface of SUS304 61 2.4.9 Electrical Properties of Double-Sided ZnO/SUS304-Based Piezoelectric Generator 63 2.5 Summary 66 References 67 3 Design and Fabrication of Vibration-Induced Electromagnetic Microgenerators 71 3.1 Introduction 71 3.2 Comparisons between MCTG and SMTG 74 3.2.1 Magnetic Core-Type Generator (MCTG) 74 3.2.2 Sided Magnet-Type Generator (SMTG) 76 3.3 Analysis of Electromagnetic Vibration-Induced Microgenerators 76 3.3.1 Design of Electromagnetic Vibration-Induced Microgenerators 77 3.3.2 Analysis Mode of the Microvibration Structure 78 3.3.3 Analysis Mode of Magnetic Field 81 3.3.4 Evaluation of Various Parameters of Power Output 84 3.4 Analytical Results and Discussion 88 3.4.1 Analysis of Bending Stress within the Supporting Beam of the Spiral Microspring 90 3.4.2 Finite Element Models for Magnetic Density Distribution 93 3.4.3 Power Output Evaluation 97 3.5 Fabrication of Microcoil for Microgenerator 103 3.5.1 Microspring and Induction Coil 103 3.5.2 Microspring and Magnet 105 3.6 Tests and Experiments 106 3.6.1 Measurement System 106 3.6.2 Measurement Results and Discussion 107 3.6.3 Comparison between Measured Results and Analytical Values 110 3.7 Conclusions 112 3.7.1 Analysis of Microgenerators and Vibration Mode and Simulation of the Magnetic Field 112 3.7.2 Fabrication of LTCC Microsensor 112 3.7.3 Measurement and Analysis Results 113 3.8 Summary 113 References 114 4 Design and Fabrication of Rotary Electromagnetic Microgenerator 117 4.1 Introduction 117 4.1.1 Piezoelectric, Thermoelectric, and Electrostatic Generators 119 4.1.2 Vibrational Electromagnetic Generators 119 4.1.3 Rotary Electromagnetic Generators 120 4.1.4 Generator Processes 121 4.1.5 Lithographie Galvanoformung Abformung Process 122 4.1.6 Winding Processes 123 4.1.7 LTCC 123 4.1.8 Printed Circuit Board Processes 124 4.1.9 Finite-Element Simulation and Analytical Solutions 126 4.2 Case 1: Winding Generator 126 4.2.1 Design 127 4.2.2 Analytical Formulation 132 4.2.3 Simulation 134 4.2.4 Fabrication Process 138 4.2.5 Results and Discussion (1) 139 4.2.6 Results and Discussion (2) 142 4.3 Case 2: LTCC Generator 146 4.3.1 Simulation 147 4.3.2 Analytical Theorem of Microgenerator Electromagnetism 148 4.3.3 Simplification 152 4.3.4 Analysis of Vector Magnetic Potential 153 4.3.5 Analytical Solutions for Power Generation 154 4.4 Fabrication 157 4.4.1 LTCC Process 157 4.4.2 Magnet Process 159 4.4.3 Measurement Set-up 160 4.5 Results and Discussion 162 4.5.1 Design 162 4.5.2 Analytical Solutions 168 4.5.3 Fabrication 170 References 178 5 Design and Fabrication of Electrospun PVDF Piezo-Energy Harvesters 183 5.1 Introduction 183 5.2 Fundamentals of Electrospinning Technology 187 5.2.1 Introduction to Electrospinning 187 5.2.2 Alignment and Assembly of Nanofibers 190 5.3 Near-Field Electrospinning 191 5.3.1 Introduction and Background 191 5.3.2 Principles of Operation 194 5.3.3 Process and Experiment 196 5.3.4 Summary 202 5.4 Continuous NFES 202 5.4.1 Introduction and Background 202 5.4.2 Principles of Operation 202 5.4.3 Controllability and Continuity 205 5.4.4 Process Characterization 208 5.4.5 Summary 211 5.5 Direct-Write Piezoelectric Nanogenerator 211 5.5.1 Introduction and Background 211 5.5.2 Polyvinylidene Fluoride 212 5.5.3 Theoretical Studies for Realization of Electrospun PVDF Nanofibers 213 5.5.4 Electrospinning of PVDF Nanofibers 216 5.5.5 Detailed Discussion of Process Parameters 219 5.5.6 Experimental Realization of PVDF Nanogenerator 223 5.5.7 Summary 241 5.6 Materials, Structure, and Operation of Nanogenerator with Future Prospects 241 5.6.1 Material and Structural Characteristics 241 5.6.2 Operation of Nanogenerator 243 5.6.3 Summary and Future Prospects 248 5.7 Case Study: Large-Array Electrospun PVDF Nanogenerators on a Flexible Substrate 248 5.7.1 Introduction and Background 248 5.7.2 Working Principle 249 5.7.3 Device Fabrication 249 5.7.4 Experimental Results 251 5.7.5 Summary 252 5.8 Conclusion 253 5.8.1 Near-Field Electrospinning 253 5.8.2 Continuous Near-Field Electrospinning 254 5.8.3 Direct-Write Piezoelectric PVDF 254 5.9 Future Directions 255 5.9.1 NFES Integrated Nanofiber Sensors 255 5.9.2 NFES One-Dimensional Sub-Wavelength Waveguide 256 5.9.3 NFES Biological Applications 257 5.9.4 Direct-Write Piezoelectric PVDF Nanogenerators 258 References 258 Index 265.…”
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