High resolution 3D nanoimprint technology template fabrication, application in Fabry-Perot-filter-based nanospectrometers /
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|---|---|
| Autor corporatiu: | |
| Format: | Thesis Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
Kassel [Germany] :
Kassel University Press,
2011.
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| Accés en línia: | Click to View |
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