Analysis and design principles of MEMS devices
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Main Author: | Bao, Min-Hang |
---|---|
Corporate Author: | ebrary, Inc |
Format: | Electronic eBook |
Language: | English |
Published: |
Amsterdam ; Oxford :
Elsevier,
c2005.
|
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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