An introduction to microelectromechanical systems engineering
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Main Author: | Maluf, Nadim |
---|---|
Corporate Author: | ebrary, Inc |
Other Authors: | Williams, Kirt |
Format: | Electronic eBook |
Language: | English |
Published: |
Boston :
Artech House,
2004.
|
Edition: | 2nd ed. |
Series: | Microelectromechanical systems series.
|
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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