Maluf, N., & Williams, K. (2004). An introduction to microelectromechanical systems engineering (2nd ed.). Artech House.
Tohutoru Kātū Chicago (17th ed.)Maluf, Nadim, me Kirt Williams. An Introduction to Microelectromechanical Systems Engineering. 2nd ed. Boston: Artech House, 2004.
Tohutoro MLA (9th ed.)Maluf, Nadim, me Kirt Williams. An Introduction to Microelectromechanical Systems Engineering. 2nd ed. Artech House, 2004.
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