Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Linkoping, Sweden :
Linkoping University,
2014.
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| Series: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Subjects: | |
| Online Access: | Click to View |
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