Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

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Bibliografiske detaljer
Andre forfattere: Liu, Changhui (Editor)
Format: Electronisk eBog
Sprog:engelsk
Udgivet: Zurich, Switzerland : TTP, 2014.
Serier:Advanced materials research ; Volume 901.
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Online adgang:An electronic book accessible through the World Wide Web; click to view
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