Next generation micro/nano systems : selected, peer reviewed papers from the Symposium E "Next Generation Micro/Nano Systems" of CIMTEC 2012 - 4th International Conference "Smart materials, Structures and Systems", held in Montecatini Terme, Italy, June 10-14, 2012 - Vincenzini, P., 1939-; Lorenzelli, Leandro (Advances in science and technology,, 2013)