Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /

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Ngā taipitopito rārangi puna kōrero
Kaituhi rangatōpū:	ebrary, Inc
Ētahi atu kaituhi:	Baltes, Henry
Hōputu:	Tāhiko īPukapuka
Reo:	Ingarihi
I whakaputaina:	Weinheim [Germany] : Wiley, 2013.
Ngā marau:	Microelectronics. Nanotechnology. Microelectromechanical systems. Electronic books.
Urunga tuihono:	An electronic book accessible through the World Wide Web; click to view
Ngā Tūtohu:	Tāpirihia he Tūtohu Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!

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