ebrary, Inc, & Baltes, H. (2013). Enabling technologies for MEMS and nanodevices: Advanced micro and nanosystems. Wiley.
Chicagoスタイル(17版)引用形式ebrary, Inc, , Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Weinheim [Germany]: Wiley, 2013.
MLA(9版)引用形式ebrary, Inc, , Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley, 2013.
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