ebrary, Inc, & Baltes, H. (2013). Enabling technologies for MEMS and nanodevices: Advanced micro and nanosystems. Wiley.
Chicago Style (17th ed.) Zitazioaebrary, Inc, eta Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Weinheim [Germany]: Wiley, 2013.
MLA (9th ed.) Zitazioaebrary, Inc, eta Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley, 2013.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.