APA (7th ed.) Citation

ebrary, Inc, & Baltes, H. (2013). Enabling technologies for MEMS and nanodevices: Advanced micro and nanosystems. Wiley.

Chicago Style (17th ed.) Citation

ebrary, Inc, and Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Weinheim [Germany]: Wiley, 2013.

MLA (9th ed.) Citation

ebrary, Inc, and Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley, 2013.