Reliability of MEMS testing of materials and devices /

Furkejuvvon:
Bibliográfalaš dieđut
Searvvušdahkki: ebrary, Inc
Eará dahkkit: Tabata, Osamu, Tsuchiya, Toshiyuki
Materiálatiipa: Elektrovnnalaš E-girji
Giella:eaŋgalasgiella
Almmustuhtton: Weinheim : Wiley-VCH, 2013.
Ráidu:Advanced micro & nanosystems.
Fáttát:
Liŋkkat:An electronic book accessible through the World Wide Web; click to view
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