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Reliability of MEMS testing of materials and devices /

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Détails bibliographiques
Collectivité auteur:	ebrary, Inc
Autres auteurs:	Tabata, Osamu, Tsuchiya, Toshiyuki
Format:	Électronique eBook
Langue:	anglais
Publié:	Weinheim : Wiley-VCH, 2013.
Collection:	Advanced micro & nanosystems.
Sujets:	Microelectromechanical systems > Reliability. Electronic books.
Accès en ligne:	An electronic book accessible through the World Wide Web; click to view
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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