Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
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Corporate Author: | ebrary, Inc |
---|---|
Other Authors: | Ekwall, Britt, Cronquist, Mikkel |
Format: | Electronic eBook |
Language: | English |
Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
Series: | Nanotechnology science and technology series.
|
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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