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Glancing angle deposition of thin films : engineering the nanoscale /

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Bibliographic Details
Main Authors:	Hawkeye, Matthew M. (Author), Taschuk, Michael T. (Author), Brett, Michael J. (Author)
Format:	Electronic eBook
Language:	English
Published:	Chichester, England : Wiley, 2014.
Series:	Wiley series in materials for electronic and optoelectronic applications.
Subjects:	Nanotechnology. Chemical vapor deposition. Nanoelectromechanical systems > Design and construction. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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