Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

I tiakina i:
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Ētahi atu kaituhi: Liu, Changhui (Editor)
Hōputu: Tāhiko īPukapuka
Reo:Ingarihi
I whakaputaina: Zurich, Switzerland : TTP, 2014.
Rangatū:Advanced materials research ; Volume 901.
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Urunga tuihono:An electronic book accessible through the World Wide Web; click to view
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