Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
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| 其他作者: | |
|---|---|
| 格式: | 电子 电子书 |
| 语言: | 英语 |
| 出版: |
Zurich, Switzerland :
TTP,
2014.
|
| 丛编: | Advanced materials research ;
Volume 901. |
| 主题: | |
| 在线阅读: | An electronic book accessible through the World Wide Web; click to view |
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