Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
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| Formato: | Recurso Electrónico livro electrónico |
| Idioma: | inglês |
| Publicado em: |
Zurich, Switzerland :
TTP,
2014.
|
| Colecção: | Advanced materials research ;
Volume 901. |
| Assuntos: | |
| Acesso em linha: | An electronic book accessible through the World Wide Web; click to view |
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