Get This : Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

Title : Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

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