Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
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企业作者: | ebrary, Inc |
---|---|
其他作者: | Ekwall, Britt, Cronquist, Mikkel |
格式: | 电子 电子书 |
语言: | 英语 |
出版: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
丛编: | Nanotechnology science and technology series.
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在线阅读: | An electronic book accessible through the World Wide Web; click to view |
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