Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
Saved in:
Corporate Author: | ebrary, Inc |
---|---|
Other Authors: | Ekwall, Britt, Cronquist, Mikkel |
Format: | Electronic eBook |
Language: | English |
Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
Series: | Nanotechnology science and technology series.
|
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
Tags: |
![]()
No Tags, Be the first to tag this record!
|
Similar Items
-
MEMS mechanical sensors
Published: (2004) -
Understanding MEMS : principles and applications /
by: Castañer, Luis
Published: (2016) -
MEMS-based integrated navigation
by: Aggarwal, Priyanka
Published: (2010) -
Smart mems and sensor systems
by: Gaura, Elena
Published: (2006) -
Reliability of MEMS testing of materials and devices /
Published: (2013)