Silicon technologies ion implantation and thermal treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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| 企業作者: | |
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| 格式: | 電子 電子書 |
| 語言: | 英语 |
| 出版: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| 主題: | |
| 在線閱讀: | An electronic book accessible through the World Wide Web; click to view |
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