Silicon technologies ion implantation and thermal treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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| Formato: | Electrónico eBook |
| Idioma: | inglés |
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London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Acceso en liña: | An electronic book accessible through the World Wide Web; click to view |
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