Silicon technologies ion implantation and thermal treatment /

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Awdur Corfforaethol: ebrary, Inc
Awduron Eraill: Baudrant, Annie
Fformat: Electronig eLyfr
Iaith:Saesneg
Cyhoeddwyd: London : Hoboken, N.J. : ISTE ; Wiley, 2011.
Pynciau:
Mynediad Ar-lein:An electronic book accessible through the World Wide Web; click to view
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