APA (7th ed.) Citation

ebrary, Inc, Park, J., & Sudarshan, T. S. (2001). Chemical vapor deposition. ASM International.

Chicago Style (17th ed.) Citation

ebrary, Inc, Jong-Hee Park, and T. S. Sudarshan. Chemical Vapor Deposition. Materials Park, Ohio: ASM International, 2001.

MLA (9th ed.) Citation

ebrary, Inc, et al. Chemical Vapor Deposition. ASM International, 2001.