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An introduction to microelectromechanical systems engineering

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Bibliographic Details
Main Author:	Maluf, Nadim
Corporate Author:	ebrary, Inc
Other Authors:	Williams, Kirt
Format:	Electronic eBook
Language:	English
Published:	Boston : Artech House, 2004.
Edition:	2nd ed.
Series:	Microelectromechanical systems series.
Subjects:	Microelectromechanical systems. Microtechnology. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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