Database needs for modeling and simulation of plasma processing
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| Corporate Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Washington, D.C. :
National Academy Press,
1996.
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| Series: | Compass series (Washington, D.C.)
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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