Microelectromechanical systems advanced materials and fabrication methods /

Microelectromechanical systems advanced materials and fabrication methods /

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Bibliographic Details
Corporate Authors: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, ebrary, Inc
Format: Electronic eBook
Language:English
Published: Washington, DC : National Academy Press, 1997.
Subjects:
Microelectronics > Materials.
Microelectromechanical systems > Design and construction.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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